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MFC
MARU7000 series (Pressure Insensitive MFC)
Pressure Insensitive Mass Flow Controller
MARU7000 series (Pressure Insensitive MFC)
MARU7000PI is MKP's representative MFC for semiconductor manufacturing process like CVD, Diffusion, Etch, Metal Interconnect and etc.
It is a pressure insensitive, digital and thermal typed MFC and registered as Samsung Electronics and SK hynix Common Spec.
It is a pressure insensitive, digital and thermal typed MFC and registered as Samsung Electronics and SK hynix Common Spec.
FEATURES
Pressure Insensitive Mass Flow Controller (PI MFC)
- Fast response time (≤1sec).
- Stability are better than MARU5000 series by PI function.
- Strong corrosion resistance by electro polishing surface treatment.
- Digital Communications: Device NET, RS-485, Analog.
SPECIFICATIONS
| model | MARU7000 / 7001 / 7002 / 7010 / 7011 / 7012 |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 50 slm |
| Flow Rate Control Range | 2 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%) |
| Response Time | ≤ 1.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.15% of FUll Scale |
| Normal Operating Pressure | 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 50 slm) |
| Maximum Operating Pressure | 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 50 slm) |
| Valve Shut Down | < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 50 slm), |
| Zero Stability | ≤± 0.5% Full Scale per year |
| Temperature Coefficient | 0.01% Full Scale per °C |
| Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
| Control Valve type | Normally Closed Solenoid |
| Seal type | Metal Seal |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L Electro-polished / Bright annealing (<0.1㎛ Ra) |
| Pressure Insensitivity | ≤± 2% of F.S up/down to 5psi/sec |
| Display type | Top mount integrated 4 digit FND , LCD |
DIMENSIONS
